| 摘要 |
PROBLEM TO BE SOLVED: To provide a new ultrahigh temperature super-speed infrared heat treatment device in which a thermal discharge of a specimen support is restricted to improve a heat efficiency, an entire device is made into a small size unit to enable itself to be mounted on a desk and its low price can be realized.SOLUTION: A transparent quartz pipe 13 is set to rise on a vacuum chamber 9, a heat-resistant specimen support 20 made of material having a superior coefficient of thermal conductivity is arranged at the upper end of this transparent quartz pipe 13 via an intermediate jig 19 made of heat shielding material, a furnace core pipe 15 made of transparent quartz enclosing the specimen support 20, intermediate jig 19 and transparent quartz pipe 13 is communicated with the vacuum chamber 9, the heated specimen is arranged under vacuum, and the furnace core pipe 15 enclosing the specimen support 20, intermediate jig 19 and transparent quartz pipe 13 is protruded into a lower rotary elliptical mirror 3 and arranged there. |
