发明名称 SEMICONDUCTOR TEST PAD USING STACKED THIN SHEETS OF METAL AND MANUFACTURING METHOD THEREOF
摘要 The present invention relates to a pad used in a semiconductor test and, more specifically, to a semiconductor test pad using the lamination of a metal thin film and a manufacturing method thereof. After laminating the metal thin film on an insulating sheet of a resin system, a first sheet is manufactured by etching the metal thin film. The metal thin film is manufactured by vertically cutting the lamination of the first sheet. The manufacturing method comprises a sheet manufacturing step for manufacturing the first sheet by coating insulating first resin on a conductive metal thin film; an etching step for manufacturing a second sheet in which each conductor on each line is separated at a predetermined distance by etching the metal thin film of the first sheet to form a plurality of lines; a lamination step for manufacturing one stack by laminating second sheets; and a cutting step for vertically cutting the stack to predetermined thickness. [Reference numerals] (S1) Sheet manufacturing step; (S1a,S3a) Primer coating step; (S2) Etching step; (S3) lamination step; (S3b) Coating step; (S4) Cutting step; (S5) Plating step
申请公布号 KR101374770(B1) 申请公布日期 2014.03.17
申请号 KR20130142617 申请日期 2013.11.22
申请人 SILICONE VALLEY CO., LTD. 发明人 YOUN, KYOUNG SEOB
分类号 H01L21/66 主分类号 H01L21/66
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