| 摘要 |
PROBLEM TO BE SOLVED: To detect an acceleration in a direction orthogonal to a specific inner wall surface.SOLUTION: An acceleration detecting element 1 comprises: an outer frame body 2; a heating element 3; a first temperature sensing element 4 for temperature measurement; a second temperature sensing element 5 for temperature measurement; and an operational amplifier 6 (differential operation circuit). In the outer frame body 2, a fluid chamber 11 (fluid-sealing chamber) capable of sealing a fluid inside thereof is formed. The heating element 3 is formed on a circuit mounting surface 12 (specific inner wall surface) which is a specific inner wall surface of a plurality of inner wall surfaces defining the fluid chamber 11. The first temperature sensing element 4 and the second temperature sensing element 5 are formed on the circuit mounting surface 12. As shown in Fig. 3, a distance D1 from the first temperature sensing element 4 to the heating element 3 is shorter than a distance D2 from the second temperature sensing element 5 to the heating element 3. The operational amplifier 6 calculates a difference between a measurement result by the first temperature sensing element 4 and a measurement result by the second temperature sensing element 5. |
