| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for quickly generating many micropores in a thin film.SOLUTION: A method for generating many micropores in a thin film at high speed is provided which uses a thin film holing device that comprises a pulse laser, a rotary polygon mirror, an imaging optical system including a telecentric f&thetas; lens, and a thin film feeding mechanism. A holing pitch in a main scanning direction on a thin film is denoted as Lx, a holing pitch in a subscanning direction on the thin film is denoted as Ly, a distance which a laser beam moves in an interval of emission of the pulse laser is denoted as La, and N is given by N=La/Lx. A feed amount Ld by which the thin film is fed in the subscanning direction in each main scanning by the feeding mechanism is calculated by Ld=Ly/N, and a holing start position of the laser beam is shifted in the main scanning direction by Lx for each main scanning, and further, holing is started from the first holing position for each (N+1)th main scanning, whereby the thin film is holed at a maximum speed of the pulse laser scanning and of the rotary polygon mirror. |
