TRANSPARENT CONDUCTIVE FILM WITH LOW SURFACE RESISTANCE AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to a transparent conductive film with low surface resistance. More particularly, the present invention relates to a transparent conductive film with low surface resistance, which includes a conductive layer formed of indium tin oxide (ITO) with 4-12 wt% of tin oxide, and a manufacturing method thereof. The transparent conductive film can obtain low surface resistance as the content of indium tin oxide in an ITO target is controlled without the addition of a metal material which reduces transmittance. Therefore, a film can economically be fabricated through an existing process without separate sputtering equipment.