| 摘要 |
PROBLEM TO BE SOLVED: To provide a component for semiconductor production capable of reducing variation in the ejection amount of gas.SOLUTION: A component 1 for semiconductor production includes a body 3, a tunnel 5 provided in the body 3, a by-pass 7 for short-circuiting two or more parts in the tunnel 5, a plurality of gas jet holes 9 leading from the tunnel 5 to the surface 3a of the body 3, and a gas supply route 11 for supplying gas to the tunnel 5 or the by-pass 7. Preferably, the bore diameter of a plurality of gas jet holes is 0.3 mm or less. |
