PRESSURE SENSOR WITH DIFFERENTIAL CAPACITIVE OUTPUT

摘要

PROBLEM TO BE SOLVED: To provide a pressure sensor with a differential capacitive output.SOLUTION: A MEMS pressure sensor device is provided that can provide both a linear output with regard to external pressure and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass that generates capacitive output from electrodes configured at both ends of the rotating proof mass. A sensor output can then be generated using a difference between the capacitances generated from these ends of the rotating proof mass. An additional benefit of such a configuration is that the differential capacitance output changes in a more linear fashion with respect to external pressure changes than does a capacitive output from traditional MEMS pressure sensors.