| 摘要 |
PROBLEM TO BE SOLVED: To reduce the fall of a wafer transfer container from a shelf, without reducing the storage capacity of the wafer transfer container, in a storage shelf.SOLUTION: When mounting a hoop FP at a normal storage position on the upper surface of a shelf plate PL, two planar movement control members HP1 are provided between two shelf plates PL located contiguously each other above and below (vertical direction), so as to hold the left side face and right side face of the hoop FP therebetween. The movement control members HP1 are provided at positions higher than side flanges SF formed, respectively, on the left side face and right side face of the hoop FP. When mounting the hoop FP at a normal storage position on the upper surface of the shelf plate PL, the movement control members HP1 and the side flanges SF are separated, but the interval of the movement control members HP1 and the side flanges SF is smaller than 15 m, and is set preferably to 10 mm or less. |
