| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating zone-type crystal growth apparatus capable of suppressing adhesion of a material evaporated from a floating zone to a tubular body.SOLUTION: A crystal growth apparatus 1 comprises: a tubular body 2 having a raw material rod 4 and a seed crystal rod 5 arranged in series in the internal space; and a laser source 3 for heating a boundary portion between the raw material rod 4 and the seed crystal rod 5 through the tubular body 2 to form a molten zone F. A gas jet nozzle 19e is separately arranged on the lower edge side of the tubular body 2 to the molten zone F in the internal space of the tubular body 2 and is provided to jet a gas toward an upper end side of the tubular body 2 so as to surround the molten zone F and generate an air flow along the internal surface of the tubular body 2. |
