| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope image acquisition condition adjustment method for adjusting the optimum acquisition condition of an electron microscope image to high efficiency and high accuracy, when acquiring a high image contrast of the electron microscope image of a sample composed of a light element by using a scanning transmission electron microscope, and to provide an electron microscope image acquisition condition calculation system and a sample film thickness calculation system.SOLUTION: A scanning transmission electron microscope having a plurality of lenses, an iris for limiting an electron beam, and a detector, and acquiring an electron microscope image comprises: an acquisition condition calculation system for calculating the acquisition condition of the electron microscope image; and a sample film thickness calculation system for calculating the sample film thickness in the electron beam transmission direction. |
