| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a photoelectric conversion device with high conversion efficiency.SOLUTION: A manufacturing method of a photoelectric conversion device according to one embodiment includes: a lower electrode forming step of alternately forming a plurality of first lower electrodes 2a and a plurality of second lower electrodes 2b at intervals in one direction on a substrate 1; and a photoelectric conversion layer forming step of forming a photoelectric conversion layer 3 including a number of closed pores S1 over the plurality of first lower electrodes 2a and the plurality of second lower electrodes 2b. The manufacturing method further includes: a gap forming step of forming a gap in the photoelectric conversion layer 3 by partially removing the photoelectric conversion layer 3 in such a manner that the closed pores S1 positioned in a portion of top faces of the second lower electrodes 2b and at an upper side around the one portion become open pores S2 and are exposed; and an upper electrode forming step of forming linear upper electrodes 42 along the one direction from on a side face in the gap of the photoelectric conversion layer 3 opposite to the one direction to on the top faces of the second lower electrodes 2b, so as to partially enter the open pores S2 which are opened on the side face. |
