MELTING POT FOR VAPOR DEPOSITION, AND VAPOR DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To realize good conductance without using a needle valve.SOLUTION: A melting pot for vapor deposition comprises: a housing part for housing a vapor deposition source; a discharge port for discharging an evaporation material evaporated from the vapor deposition source toward a processed substrate; a guide passage for guiding the evaporation material to the discharge port from the housing part; and a shutter device that is provided at a middle part of the guide passage and can block circulation of the evaporation material in the guide passage. The shutter device comprises a first plate-like member having a first opening through which the evaporation material can be circulated, and a second plate-like member having a second opening through which the evaporation material can be circulated. The first plate-like member is provided with a first blocking part that can block the second opening of the second plate-like member. The second plate-like member is provided with a second blocking part that can block the first opening of the first plate-like member.