A RADIO FREQUENCY MAGNETRON SPUTTERING APPARATUS,申请号HK20130113293-传众专利搜索

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发明名称	A RADIO FREQUENCY MAGNETRON SPUTTERING APPARATUS
摘要
申请公布号	HK1186342(A2)	申请公布日期	2014.03.14
申请号	HK20130113293	申请日期	2013.11.28
申请人	HONG KONG PRODUCTIVITY COUNCIL	发明人	LO, WAI YIN;YAU, MAN YAN ERIC;ZHANG, ZHONGXIANG JOHNSON;YICK, MAN LUNG;LAU, YIU HUNG
分类号	C23C	主分类号	C23C
代理机构		代理人
主权项
地址

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