发明名称 METHOD FOR PRODUCING WATER-RESISTANT ALUMINUM NITRIDE POWDER
摘要 Provided is a method for producing a water-resistant aluminum nitride powder, which enables the impartment of satisfactory water resistance to an aluminum nitride powder having yttria existing on the surfaces of particles thereof. A method for producing a water-resistant aluminum nitride powder by treating the surfaces of particles of an aluminum nitride powder, which comprises (i) a step of bringing an aluminum nitride powder having yttria existing at least on the surfaces of particles thereof into contact with an acid solution and (ii) a step of bringing the aluminum nitride powder into contact with a phosphoric acid compound in this order, wherein the amount of yttria extracted from the aluminum nitride powder that is produced by carrying out step (i) and then subjecting the resultant product to filtration, washing with water and drying, with 1 mol/L of hydrochloric acid is 1000 mg or less relative to 100 g of the aluminum nitride powder.
申请公布号 WO2014038676(A1) 申请公布日期 2014.03.13
申请号 WO2013JP74150 申请日期 2013.09.06
申请人 TOKUYAMA CORPORATION 发明人 TAMAGAKI, MEGUMU;KANECHIKA, YUKIHIRO
分类号 C01B21/072;H01L23/373 主分类号 C01B21/072
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