| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder for a scanning electron microscope in which a slide glass used for observation by an optical microscope can be used as an observation sample as it is, and also to provide the scanning electron microscope mounting the sample holder thereon.SOLUTION: A scanning electron microscope according to an embodiment includes an evacuation system 13 enabling low vacuum control, an energy dispersion type X-ray detector 14, and a sample holder 15 capable of mounting a slide thereon. Thereby, the slide used for observation by a polarization microscope becomes possible to be mounted on an electron microscope as it is, and the same sample makes it possible to provide the scanning electron microscope capable of observation and analysis. |
