| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus and a method for controlling the same are provided to improve process efficiency by performing a chip fixing process and a position information process at the same time. CONSTITUTION: A substrate is fixed to a preparation region (300). The substrate is transferred to a process region (400). A semiconductor chip is mounted on the substrate in the process region. Coordinate conversion information is used for the mounting process. The coordinate conversion information between the preparation region and the process region is used for mounting the semiconductor chip on the process region. |
