| 摘要 |
PURPOSE: A nano-tube thin film gas sensor and a manufacturing method thereof are provided to obtain a gas sensor capable of mass production, with large area and high gas sensitivity, a rapid response speed, and an ultra-low sensing concentration limit. CONSTITUTION: A manufacturing method of a nano-tube thin film gas sensor comprises: a step of preparing a substrate(10) where an electrode(20) is formed; a step of depositing a metal thin film(32) on the electrode of the substrate; a step of forming a gas sensing layer including a metal nono-tube(34) by anodizing the metal thin film; and a step of etching the surface of the gas sensing layer. [Reference numerals] (AA) Anodization; (BB) Surface etching; (CC) Heat treatment |
