发明名称 SEMICONDUCTOR DEVICE HAVING LOW DIELECTRIC INSULATING FILM AND MANUFACTURING METHOD OF THE SAME
摘要 A semiconductor device includes a semiconductor substrate on which a structure portion is provided except a peripheral portion thereof, and has a laminated structure including low dielectric films and wiring lines, the low dielectric films having a relative dielectric constant of 3.0 or lower and a glass transition temperature of 400� C. or higher. An insulating film is formed on the structure portion. A connection pad portion is arranged on the insulating film and connected to an uppermost wiring line of the laminated structure portion. A bump electrode is provided on the connection pad portion. A sealing film made of an organic resin is provided on a part of the insulating film which surrounds the bump electrode. Side surfaces of the laminated structure portion are covered with the insulating film and/or the sealing film.
申请公布号 US2014073090(A1) 申请公布日期 2014.03.13
申请号 US201314081303 申请日期 2013.11.15
申请人 TERAMIKROS, INC. 发明人 MIZUSAWA AIKO;OKADA OSAMU;WAKABAYASHI TAKESHI;MIHARA ICHIRO
分类号 H01L21/78 主分类号 H01L21/78
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