| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and a manufacturing method for manufacturing a microstructure having a certain angle more reliably.SOLUTION: A manufacturing apparatus for a microstructure including an ion gun 4 for irradiating the surface of an irradiated object 8 with a focused ion beam 14, a gas supply section 9 for supplying material gas to a region being irradiated with the focused ion beam 14, and a scan deflector 6 for scanning the focused ion beam 14, is further provided with an irradiation amount control section 10 for controlling the irradiation amount of the focused ion beam 14. The irradiation amount control section 10 has a measurement section 11 for measuring the electrical characteristics caused by the focused ion beam 14, and controls the irradiation amount of the focused ion beam 14 so that the electrical characteristics fall within a predetermined range. |
