SELF-ALIGNED CONTACTS

摘要

Self-aligned contacts in a metal gate structure and methods of manufacture are disclosed herein. The method includes forming a metal gate structure (22) having a sidewall structure (24). The method further includes recessing the metal gate structure (22) and forming a masking (30) material within the recess. The method further includes forming a borderless contact (38) adjacent to the metal gate structure (22), overlapping the masking (30) material and the sidewall structure (24).