发明名称 |
TI-AL-TA-BASED COATING EXHIBITING ENHANCED THERMAL STABILITY |
摘要 |
The present invention relates to a wear resistant coating system comprising a tantalum containing multilayered film consisting of n A layers and m B layers, where n and m are integral numbers larger than 1, deposited alternating one on each other, said multilayered film exhibiting crystalline cubic structure, characterized in that the B layers comprises tantalum and the A layers exhibit a higher defect density than the B layers. |
申请公布号 |
WO2014037104(A1) |
申请公布日期 |
2014.03.13 |
申请号 |
WO2013EP02658 |
申请日期 |
2013.09.04 |
申请人 |
OERLIKON TRADING AG, TRUEBBACH |
发明人 |
RACHBAUER, RICHARD;HOLLERWEGER, ROBERT;KOLLER, CHRISTIAN, MARTIN;MAYRHOFER, PAUL, HEINZ |
分类号 |
C23C14/06;C23C14/32;C23C28/00;C23C28/04 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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