发明名称 TI-AL-TA-BASED COATING EXHIBITING ENHANCED THERMAL STABILITY
摘要 The present invention relates to a wear resistant coating system comprising a tantalum containing multilayered film consisting of n A layers and m B layers, where n and m are integral numbers larger than 1, deposited alternating one on each other, said multilayered film exhibiting crystalline cubic structure, characterized in that the B layers comprises tantalum and the A layers exhibit a higher defect density than the B layers.
申请公布号 WO2014037104(A1) 申请公布日期 2014.03.13
申请号 WO2013EP02658 申请日期 2013.09.04
申请人 OERLIKON TRADING AG, TRUEBBACH 发明人 RACHBAUER, RICHARD;HOLLERWEGER, ROBERT;KOLLER, CHRISTIAN, MARTIN;MAYRHOFER, PAUL, HEINZ
分类号 C23C14/06;C23C14/32;C23C28/00;C23C28/04 主分类号 C23C14/06
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