发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 Semiconductor devices and methods of fabricating semiconductor devices are provided. Two or more layers can be formed on a silicon substrate, wherein one or more of the layers are used for controlling an isolation recess. A first layer can comprise a first material and a second layer can comprise a second material.
申请公布号 US2014070328(A1) 申请公布日期 2014.03.13
申请号 US201213611040 申请日期 2012.09.12
申请人 GOTO MASAKAZU;HOKAZONO AKIRA;TOSHIBA AMERICA ELECTRONIC COMPONENTS, INC. 发明人 GOTO MASAKAZU;HOKAZONO AKIRA
分类号 H01L27/088;H01L21/8234 主分类号 H01L27/088
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