发明名称 BOLOMETER, AND BOLOMETER ARRAY
摘要 PROBLEM TO BE SOLVED: To provide a bolometer and a bolometer array which achieve high detection efficiency, having wavelength selectivity and less incident angle dependence.SOLUTION: A bolometer includes: a light absorber 7 which has a stack structure 8 including a first metal layer 9, a dielectric layer 10 stacked on the first metal layer 9, and a second metal layer 11 stacked on the dielectric layer 10, and which absorbs incident light of a predetermined wavelength, so as to generate heat; and a resistor 5 which is thermally connected to the light absorber 7, and which has an electric resistance that varies depending on the heat generated by the light absorber 7. In the stack structure 8, a surface plasmon is excited by the incident light of the predetermined wavelength, and a first width of at least one of the first metal layer 9 and the second metal layer 11, along a first direction at an interface between the dielectric layer 10 and at least one of the first metal layer 9 and the second metal layer 11, becomes a first length L1 at which the surface plasmon is allowed to resonate.
申请公布号 JP2014044164(A) 申请公布日期 2014.03.13
申请号 JP20120187691 申请日期 2012.08.28
申请人 HAMAMATSU PHOTONICS KK 发明人 HIROHATA TORU;NAKAJIMA KAZUTOSHI;AKAHORI WATARU
分类号 G01J1/02;G01J3/36 主分类号 G01J1/02
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