发明名称 |
Trägheitssensor |
摘要 |
A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different. |
申请公布号 |
DE102013212915(A8) |
申请公布日期 |
2014.03.13 |
申请号 |
DE201310212915 |
申请日期 |
2013.07.03 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
ZHANG, YUHUA;JEONG, HEEWON;YAMANAKA, KIYOKO;HAYASHI, MASAHIDE |
分类号 |
B81B7/02;B81B5/00;G01C19/56;G01P15/02;G01P15/097 |
主分类号 |
B81B7/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|