发明名称 TRANSFER APPARATUS, OBJECT TO BE FORMED, AND TRANSFER METHOD
摘要 PROBLEM TO BE SOLVED: To provide a transfer apparatus for transferring a fine transfer pattern made on a sheet-like mold to an object to be formed, which eliminates the occurrence of fine bubbles in the object to be formed during transfer and achieves efficient transfer.SOLUTION: The transfer apparatus includes: a vacuum lamination part 3 for laminating a mold M and an object to be formed W in a vacuum atmosphere; and a transfer part 5 for transferring a fine transfer pattern M1 of the mold M to the object to be formed W which is transported in a state laminated in the vacuum lamination part 3.
申请公布号 JP2014043038(A) 申请公布日期 2014.03.13
申请号 JP20120186300 申请日期 2012.08.27
申请人 TOSHIBA MACH CO LTD 发明人 SUGIURA HIROYOSHI;SHOGETSU ISAO;FUJIWARA SHIGERU;KITAHARA HIDETOSHI;MUROFUSE ISAMU
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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