发明名称 |
TRANSFER APPARATUS, OBJECT TO BE FORMED, AND TRANSFER METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a transfer apparatus for transferring a fine transfer pattern made on a sheet-like mold to an object to be formed, which eliminates the occurrence of fine bubbles in the object to be formed during transfer and achieves efficient transfer.SOLUTION: The transfer apparatus includes: a vacuum lamination part 3 for laminating a mold M and an object to be formed W in a vacuum atmosphere; and a transfer part 5 for transferring a fine transfer pattern M1 of the mold M to the object to be formed W which is transported in a state laminated in the vacuum lamination part 3. |
申请公布号 |
JP2014043038(A) |
申请公布日期 |
2014.03.13 |
申请号 |
JP20120186300 |
申请日期 |
2012.08.27 |
申请人 |
TOSHIBA MACH CO LTD |
发明人 |
SUGIURA HIROYOSHI;SHOGETSU ISAO;FUJIWARA SHIGERU;KITAHARA HIDETOSHI;MUROFUSE ISAMU |
分类号 |
B29C59/02;H01L21/027 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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