| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular pump that can correctly, continuously, and stably detect relative humidity at a portion where condensation is most likely to occur inside a control unit, thereby reliably preventing condensation from occurring and achieving efficient operation.SOLUTION: A molecular pump 1A comprises a pump body 2 provided with a turbo molecular pump part 2a, a control unit 4 provided with a control part and a power supply part, and a cooling unit 3 for cooling the pump body 2 and the control unit 4. A temperature sensor 90 is provided at a first position where temperature is low inside the control unit 4, and a temperature/humidity sensor 80 is provided at a second position where temperature is high inside the control unit 4. The control part controls the operation of the cooling unit 3 on the basis of relative humidity at the first position, which is calculated from data on temperature and humidity detected by the temperature sensor 90 and the temperature/humidity sensor 80. |
