发明名称 METHODS OF FORMING DIFFERENT FINFET DEVICES WITH DIFFERENT THRESHOLD VOLTAGES AND INTEGRATED CIRCUIT PRODUCTS CONTAINING SUCH DEVICES
摘要 One illustrative method disclosed herein involves forming a first fin for a first FinFET device in and above a semiconducting substrate, wherein the first fin is comprised of a first semiconductor material that is different from the material of the semiconducting substrate and, after forming the first fin, forming a second fin for a second FinFET device that is formed in and above the semiconducting substrate, wherein the second fin is comprised of a second semiconductor material that is different from the material of the semiconducting substrate and different from the first semiconductor material.
申请公布号 US2014070322(A1) 申请公布日期 2014.03.13
申请号 US201213613508 申请日期 2012.09.13
申请人 JACOB AJEY P.;MASZARA WITOLD P.;AKARVARDAR KEREM;GLOBALFOUNDRIES INC. 发明人 JACOB AJEY P.;MASZARA WITOLD P.;AKARVARDAR KEREM
分类号 H01L21/20;H01L27/088 主分类号 H01L21/20
代理机构 代理人
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