| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which can be improved in the capability of cleaning an object to be cleaned by effectively boiling a cleaning liquid stored in the bottom side within a cleaning tank and by causing bumping throughout the inside of the tank when gas is introduced.SOLUTION: A cleaning apparatus comprises: a cleaning tank 3 for storing a cleaning liquid W therein; heating and pressure reducing means including a heating section 5 for heating the cleaning liquid W stored in a bottom side within the cleaning tank 3 and a pressure reducing section 6 for boiling the heated cleaning liquid W; a temperature detecting section 92 for detecting a temperature of the cleaning liquid W; pressure detecting means 91 for detecting a pressure within the cleaning tank 3; and a control section 10. While the cleaning liquid W is boiled under reduced pressure by the heating and pressure reducing means 5 and 6, when the temperature detected by the temperature detecting section 92 is below a first set temperature value T1 and the pressure within the cleaning tank 3 detected by the pressure detecting means 91 is below a first set pressure value P1, the control section 10 controls the heating and pressure reducing means 5 and 6 so that the cleaning liquid W stored in the cleaning tank 3 is heated for a first heating time K1. |
