发明名称 SHEET-LIKE MEMBER HOLDER, SHEET-LIKE MEMBER INSTALLATION APPARATUS AND SHEET-LIKE MEMBER INSTALLATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet-like member holder, a sheet-like member installation apparatus and a sheet-like member installation method that make it easier to handle a sheet-like member which has a very fine transfer pattern or to which a very fine transfer pattern is transferred.SOLUTION: A sheet-like member holder 1 holds a sheet-like member W which has a very fine transfer pattern or to which a very fine transfer pattern is transferred. In the sheet-like member holder 1, at least a peripheral part of the sheet-like member W is sandwiched by sheet-like member holding bodies 27, 29 of sheet-like member holding means 19 and inclined planes 23, 25 of a base member 17, so that the sheet-like member W is held.
申请公布号 JP2014043104(A) 申请公布日期 2014.03.13
申请号 JP20130203385 申请日期 2013.09.30
申请人 TOSHIBA MACH CO LTD 发明人 ITANI SHINYA;KOKUBO MITSUNORI;SUGIURA HIROYOSHI
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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