CATADIOPTRIC PROJECTION OBJECTIVE LENS HAVING INTERMEDIATE IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective lens that attains extremely high resolution by a compact design having a dimension optimized.SOLUTION: A catadioptric projection objective lens has: a first objective lens part that forms a first intermediate image by imaging an object field; a second objective lens part that generates a second intermediate image using radiation arriving from the first objective lens part; and a third objective lens part that forms the second intermediate image on an imaging plane surface. The second objective lens part is a catadioptric objective lens part having a concave mirror, and is provided with a first bending mirror that deflects radiation arriving from an object plane surface in a direction of the concave mirror and a second bending mirror that deflects radiation arriving from the concave mirror in a direction of the imaging plane surface. A field lens having positive refractive power is arranged in an area close to a field of the first intermediate image between the first intermediate image and/or the first bending mirror and the concave mirror.