发明名称 INSPECTION METHOD AND INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an inspection method for achieving stability and high-speed inspection, and an inspection device.SOLUTION: In an empty workpiece image processing process, an image of an empty workpiece without a member to be inspected can be obtained. In a normal workpiece image processing process, an image of a workpiece with the member mounted thereon can be obtained. In an extraction process, only an image of the member can be extracted by removing the image obtained by the empty workpiece image processing process from the image obtained by the normal workpiece image processing process. In an inspection process, visual inspection can be performed from the image obtained by extracting only the member to be inspected.
申请公布号 JP2014044066(A) 申请公布日期 2014.03.13
申请号 JP20120185261 申请日期 2012.08.24
申请人 CANON MACHINERY INC 发明人 KAWAMURA TATSUYUKI
分类号 G01N21/88;H01L21/52;H01L21/60 主分类号 G01N21/88
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