| 摘要 |
<p>Disclosed herein is a cost effective, efficient, massively parallel multi-wafer test cell. Additionally, this test cell can be used for both single-touchdown and multiple - touchdown applications. The invention uses a novel "split-cartridge" design, combined with a method for aligning wafers when they are separated from the probe card assembly, to create a cost effective, efficient multi-wafer test cell. A "probe-card stops" design may be used within the cartridge to simplify the overall cartridge design and operation.</p> |
| 申请人 |
ADVANTEST CORPORATION;ANDBERG, JOHN, W.;LEVENTHAL, IRA, H.;LOSEY, MATTHEW, W.;DESTA, YOHANNES;NAMBURI, LAKSHMIKANTH;LOPOPOLO, VINCE;GROVER, SANJEEV;VOLKERINK, ERIK |
发明人 |
ANDBERG, JOHN, W.;LEVENTHAL, IRA, H.;LOSEY, MATTHEW, W.;DESTA, YOHANNES;NAMBURI, LAKSHMIKANTH;LOPOPOLO, VINCE;GROVER, SANJEEV;VOLKERINK, ERIK |
