| 摘要 |
The invention provides a probe apparatus for delivering the probe card, performing reliable transferring and inhibiting damages on the probe card, and a probe card installation method. The probe apparatus comprises a card-clamping mechanism, a wafer sucker, a dial with positioning marks on the bottom surface, dial support, a camera, a moving mechanism and a control unit. The dial support is used for supporting the dial. The moving mechanism is used for moving the dial to a connection transferring position between the moving mechanism and the disc support. The control unit used for shooting the positioning marks on the dial configured at the transferring position by the moving mechanism, and detecting the position of the positioning marks. When the positioning mark is within a prescribed scope, a transferring of the probe card from the moving mechanism to the dial support is performed. When the positioning mark is beyond the prescribed scope, the transferring of the probe card from the moving mechanism to the dial support is stopped. |
