摘要 |
The present invention relates to a centrifugation device for removing bubbles in a syringe- filling substance, the device being adapted in such a way that, during the production of an adhesive used in a semiconductor production process, any microbubbles present in the adhesive, which fills the syringe, can be completely removed by activating a centrifuge by using a predetermined vacuum pressure, and the invention comprises: a centrifuge comprising a circular main body, a sealing cover which is hermetically mounted on the upper part of the main body, a rotational shaft and rotational body which are rotated by means of the drive of a motor, mounting parts which are joined to hinge shafts formed on four surfaces of the rotational body, syringes which are held in the mounting parts via holders, a vacuum tube and vacuum-release tube formed connected to the bottom of the main body, and a vacuum sensor provided in the vacuum tube; a vacuum drive unit which lowers the pressure inside the main body to a predetermined pressure, via the vacuum tube; a sensor sensing unit which inputs, to a control unit, the pressure value detected from the vacuum sensor; a motor drive unit which makes the rotational shaft rotate by driving the motor; and the control unit which controls the operation of the centrifuge, keeps the internal pressure of the main body constant at a predetermined value, and controls the drive of the motor at a predetermined RPM and drive time. |