| 摘要 |
Provided is a mounting port that generates few particles and is equipped with shutters having a simple opening/closing structure. This mounting port relays articles between a transfer device or a processing device and an operator in a cleanroom. The mounting port is equipped with: a platform for articles; a device-side opening for enabling the transport device or the processing device to pass the articles to and from the platform; an aisle-side opening facing the operator aisle; shutters provided at the position where the device-side opening is opened/closed and comprising arc-shaped plates or plates which are bent in an arc shape; and a rotation mechanism that rotates the shutters around prescribed axes, between a state wherein the device-side opening is open and a state wherein it is closed. |
