发明名称 Selecting Parameters for Defect Detection Methods
摘要 Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for a defect detection method are provided. One method includes selecting one or more parameters of a defect detection method using an optimization function and information for a set of classified defects, which includes defects of interest and nuisance defects, such that the one or more parameters satisfy an objective for the defect detection method.
申请公布号 US2014072203(A1) 申请公布日期 2014.03.13
申请号 US201213610658 申请日期 2012.09.11
申请人 WU KENONG;LEE CHRIS W.;VAN RIET MICHAEL J.;LIU YI;KLA-TENCOR CORPORATION 发明人 WU KENONG;LEE CHRIS W.;VAN RIET MICHAEL J.;LIU YI
分类号 G06K9/62 主分类号 G06K9/62
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