| 发明名称 |
FINFET CAPACITOR AND MANUFACTURING METHOD THEREOF |
| 摘要 |
Capacitors are disclosed that can be manufactured in a FinFET- compatible process. The capacitors comprise fins (506, 508) formed on a substrate, wherein the fins are separated from each by a capacitor dielectric material. The fins having the same polarity are connected to each other by means of cap connections (510, 512). |
| 申请公布号 |
WO2014039558(A1) |
申请公布日期 |
2014.03.13 |
| 申请号 |
WO2013US58066 |
申请日期 |
2013.09.04 |
| 申请人 |
QUALCOMM INCORPORATED |
发明人 |
ZHANG, RON;CHUA-EOAN, LEW G.;GU, SHIQUN |
| 分类号 |
H01L21/84;H01L27/06;H01L27/12;H01L27/13;H01L49/02 |
主分类号 |
H01L21/84 |
| 代理机构 |
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代理人 |
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| 主权项 |
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