| 摘要 |
[Problem] To provide a fixed-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, which is an area of high pressure where the deposition of products (deposits) occurs easily; in addition, to provide a vacuum pump equipped with this fixed-side member. [Solution] A threaded groove spacer constructed so as to have a coefficient of thermal conductivity lower than a prescribed value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of the members which oppose or make contact with the threaded groove spacer. Specifically, the material is one having a coefficient of thermal conductivity lower than aluminum or aluminum alloys, and preferably is one of the following: stainless steel, fiber-reinforced plastic, polyetherimide, or polyetheretherketone. (2) The threaded groove spacer is constructed with two or more parts groups. |
