| 摘要 |
A spinless coater and a coating method using the same are provided to operate two coating material supply units alternately, which are installed at both sides of a slit nozzle, with each other to eliminate the waiting time of the slit nozzle. A slit nozzle(100) jets a coating material on a substrate therethrough. A slit nozzle driver(200) drives the slit nozzle. At least two coating material supply units(300a,300b) supply the coating material to the slit nozzle. The slit nozzle is connected to the two coating material supply units. The coating material supply unit includes a pump for supplying the coating material to the slit nozzle, and a filter portion for removing external particles from the coating material. |
