发明名称 Vacuum leak check device of Vacuum type bellows
摘要 A vacuum leak check device of bellows according to the present invention comprises: a check unit (10) which is composed of a vacuum pump (11) for sucking air existing inside of bellows (B) and a gas detection part (13) for detecting gas in the sucked air; a first seating unit (20) which is composed of a first plate-shaped attachment plate (21) having a first borehole (21a), a first vacuum connecting part (22) connected to the first borehole (21a) and a vacuum suction hose (12), and a first mounting plate (23) horizontally connected to the bottom of the first attachment plate (21); a second seating unit (30) which is composed of a second attachment plate (31) having a second borehole (31a), a second vacuum connecting part (32) connected to the second borehole (31a) and the vacuum suction hose (12), a second mounting plate (33) horizontally formed on the bottom of the second attachment plate (31), and a second seating moving part (34) formed on the bottom of the second mounting plate and horizontally moves the second mounting plate (33); and a plate-shaped base part (40) which is placed on the first seating unit or the second seating unit. The vacuum leak check device accurately determines whether the bellows are damaged.
申请公布号 KR101372527(B1) 申请公布日期 2014.03.13
申请号 KR20130003734 申请日期 2013.01.14
申请人 发明人
分类号 G01M3/00;G01M3/20;H01L21/66 主分类号 G01M3/00
代理机构 代理人
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