| 摘要 |
The present invention relates to a chemical suction device capable of collecting chemical of a chemical supply line to a collecting container through a collecting hose when a suction pump is operated by punching a hole in the chemical supply line, which is connected to semiconductor manufacturing equipment installed in a semiconductor processing room, by using a clamp device comprising a drill and inserting the drill into the chemical supply line. A suction unit of a suction pump is connected to the syringe shaped drill by using the collecting hose. A discharge unit of the suction pump and the collecting container are connected by using the collecting hose. The present invention is provided to conveniently collect the chemical without performing a pipe connection task and easily collect the chemical when the semiconductor installation equipment is replaced or removed. |
