发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>Provided are a nonvolatile memory device and a method for manufacturing the same. According to one embodiment of the present invention, the nonvolatile memory device comprises a gate structure which is formed on a substrate and includes a successively stacked tunnel insulating layer, a floating gate, an intergate insulating layer, and a control gate; and an interlayer dielectric which covers the gate structure and has an air gap that is formed between the gate structures, wherein the bottom surface of the air gap is lower than the surface of the tunnel insulating layer.</p>
申请公布号 KR20140030483(A) 申请公布日期 2014.03.12
申请号 KR20120095700 申请日期 2012.08.30
申请人 SK HYNIX INC. 发明人 LEE, BYUNG IN;KIM, TAE GYUN
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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