| 摘要 |
The calorimetric sensor has resistance paths (2,3) made of temperature-dependent resistance material that are formed with concentric loops (2a,2b) and diagonal loops (3a) on a substrate (1) to form a heating resistor and a temperature measuring resistor. The resistance paths form a branched or nested structure (10) in a plan view. The concentric loops are transverse to a central axis (Z) in top view and are extended between the diagonal loops. |
