Multifunctional Scanning Probe Microscope

摘要

The microscope has a preliminary approach block (3) movablely placed on a base (1), a piezoscanner (4) placed on the block, and an object-carrier (5) placed on the piezoscanner. A sample (6) includes a measurement zone (M) and fixed on the piezoscanner using the object-carrier. A plate (9) is fixed on the base against the sample, and an analyzer is placed on the plate. The analyzer has measurement heads (13, 16) oriented towards the sample to probe the zone of the sample. Guides (10, 11) are fixed on the plate. The heads are movablely and respectively placed on the guides.