发明名称 EXPOSURE DEVICE FOR LARGE-AREA AND UNIFORMITY OF LIGHT
摘要 <p>The present invention relates to an exposure apparatus capable of uniformly exposing a substance with a large area to be exposed through a single exposure process. The uniform light exposure apparatus for a large area according to the present invention is able to uniformly irradiate ultraviolet on a display panel of a large area which is a substrate to be exposed through a single exposure process by using an ultraviolet guide part, is able to prevent the stain phenomenon of the display panel capable of being generated by the non-uniform exposure of ultraviolet, increases productivity by reducing exposure time and is able to reduce power consumption. Additionally, the exposure apparatus is able to perform an exposure process without a lens and a mirror, does not need an additional excessive cooling device and is able to reduce manufacture costs and installation costs by the simplification of a structure, reduction of a volume and the lightness of an equipment as compared to an existing exposure apparatus. [Reference numerals] (AA) Substrate to be exposed (display panel)</p>
申请公布号 KR20140030527(A) 申请公布日期 2014.03.12
申请号 KR20120096394 申请日期 2012.08.31
申请人 LS TECH CO., LTD. 发明人 RHEW, CHOONG YOP;PARK, DAI SOUNG
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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