晶体研磨抛光的夹持装置,申请号CN201320445832.5-传众专利搜索

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发明名称	晶体研磨抛光的夹持装置
摘要	实用新型公开了一种晶体研磨抛光的夹持装置，包括基座（1）、轴承（2）和套环（3）；所述套环（3）上套装有轴承（2），所述轴承（2）上设置有轴承延长臂（4），所述轴承延长臂（4）固定在基座（1）内。
申请公布号	CN203471550U	申请公布日期	2014.03.12
申请号	CN201320445832.5	申请日期	2013.07.24
申请人	上海超硅半导体有限公司	发明人	何静生;刘浦锋;宋洪伟;陈猛
分类号	B24B37/27(2012.01)I	主分类号	B24B37/27(2012.01)I
代理机构	杭州中成专利事务所有限公司 33212	代理人	金祺
主权项	晶体研磨抛光的夹持装置，包括基座（1）、轴承（2）和套环（3）；其特征是：所述套环（3）上套装有轴承（2），所述轴承（2）上设置有轴承延长臂（4），所述轴承延长臂（4）固定在基座（1）内。
地址	201617 上海市松江区石湖荡镇养石路88号

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