IMPROVED MAINTENANCE STRUCTURE AND METHOD OF FLOATING-TYPE COATING APPARATUS OF SUBSTRATE, AND FLOATING-TYPE COATING APPARATUS OF SUBSTRATE HAVING THE SAME

摘要

Disclosed in the present invention are, an improved structure and a method for the maintenance of an up-lift type substrate coating apparatus and an up-lift type substrate coating apparatus having the same. According to an embodiment of the present invention, the maintenance structure of an up-lift type substrate coating apparatus includes: a linear motion guide which is provided under a gantry built with a nozzle device; a rail which is provided onto a frame mounted with a stage for uplifting a substrate, and which is mounted with the linear motion guide, capable of moving; a drive unit which moves the gantry to an edge of the substrate coating apparatus, when the nozzle device needs a maintenance work; and a work capable of moving from the outside of the substrate coating apparatus, to the above edge.