| 摘要 |
The present invention relates to a method of manufacturing a solar cell which includes: a substrate preparation step for preparing a first conductive type substrate, an emitter layer formation step for forming a second conductive type emitter layer which is located on the front surface of the substrate, an oxide layer formation step for forming an oxide layer by oxidizing the back side or the back side and the front side of the substrate, a passivation layer formation step for forming a passivation layer on the surface of the oxide layer, and a back side electrode formation step for forming a back side electrode which is formed in the lower surface of the passivation layer and is electrically connected to the lower surface of the substrate. [Reference numerals] (AA) Start; (BB) End; (S10) Substrate preparation step; (S20) Emitter layer formation step; (S30) Oxide layer formation step; (S40) Anti-reflection formation step; (S50) Front electrode formation step; (S60) Passivation formation step; (S70) Back side electrode formation step |
