METHOD FOR MANUFACTURING SILICON-CARBON NANO COMPOSITE FOR ANODE ACTIVE MATERIAL OF LITHIUM SECONDARY BATTERIES

摘要

Disclosed is a production method of a silicon-carbon nanocomposite powder for a negative electrode active material of a lithium secondary battery. The production method of the silicon-carbon nanocomposite powder, according to an embodiment of the present invention, comprises the following steps: a step for forming an inert atmosphere by supplying inert gas into a reaction chamber; a step for generating a RF plasma inside the reaction chamber; a step for inserting a silicon powder inside the reaction chamber with the RF plasma; a step for evaporating the silicon powder using the plasma; a step for pyrolyzing by flowing hydrocarbon gas into the chamber; and a step for condensing the carbon pyrolyzed from the hydrocarbon and the evaporated silicon. [Reference numerals] (S10) Step for forming inert atmosphere; (S20) Step for generating plasma; (S30) Step for inserting silicon powder; (S40) Step for evaporating the silicon powder; (S50) Step for pyrolyzing hydrocarbon; (S60) Step for condensing silicon-carbon nanocomposite powder