| 摘要 |
A substrate support (20, 120) includes a drum (24, 124), a first surface (40, 42, 140, 142) carried by the drum (24, 124), and a second surface (40, 42, 140, 142) carried by the drum (24, 124) opposite and oblique to the first surface (40, 42, 140, 142) and a wedging member (44, 144). The wedging member (44, 144) is sandwiched between the first surface (40, 42, 140, 142) and the second surface (40, 42, 140, 142) and is resiliently biased in a wedging direction. |
